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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPS6396270(A)
申请公布日期
1988.04.27
申请号
JP19860243611
申请日期
1986.10.13
申请人
MITSUBISHI ELECTRIC CORP
发明人
USUI YOSHIHIRO
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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