| 摘要 |
PURPOSE:To remove curling portions at the edges of an electrode film and prevent the occurrence of disconnection, by etching a photoactive layer located at an adjacent spacing part of an electrode film, and then subjecting this electrode film to etching using the same mask as that used to etch the phototactive layer. CONSTITUTION:A first electrode film which is divided into film parts 2a, 2b,..., a photoactive layer 3 and a second electrode film 4 are successively deposited on one main surface of a substrate 1 having insulating properties. A photoresist film 5 is deposited on the film 4 through an adjacent spacing part ab which is to be removed. A second electrode part 4' at the spacing part ab is removed. The exposed photoactive part 3' is removed by etching using the film 5 as a mask. As a result, the photoactive layer 3 is divided into individual parts 3a, 3b, and the first electrode film pats 2b in one region is partially exposed. The second electrode film parts 4a, 4b are etched. As a result, curling edges 4ae, 4be are removed. The film 5 is removed, and a connecting electrode film 6ab which connects the first electrode film part 2b and the second electrode film part 4a is formed. |
