发明名称 Silica glass tray made for wafers
摘要 A tray made of silica glass or ceramic material with a seating component made out of U-shaped lengths, for disk-shaped elements and especially for round wafers, whereby the elements are secured in the seating component by means of slots. To provide a tray that is shaped in such a way as to provide easy access, is highly stable, and is designed to accept a wide range of wafer sizes, the seating component is in the form of two U sections, each with a base and two sides that are spaced by means of transverse tubes in such a way that the bases of the sections slope toward each other, the slots in the sides being deep enough for the upright elements to rest at points or along lines on the bases.
申请公布号 US4569452(A) 申请公布日期 1986.02.11
申请号 US19850736596 申请日期 1985.05.21
申请人 HERAEUS QUARZSCHMELZE GMBH 发明人 SCHUELKE, KARL-ALBERT
分类号 H01L21/673;C30B25/12;C30B31/14;C30B35/00;H01L21/22;H01L21/67;(IPC1-7):B65D25/28 主分类号 H01L21/673
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