| 摘要 |
PURPOSE:To etch uniformly a sample at a high speed or to form a uniform and thick film on the sample by providing magnetic field generating means for electrically generating a magnetic field continuously movable in the prescribed direction. CONSTITUTION:A vessel is separated by a cathode into an etching chamber 13 and a magnetic field generator containing chamber 14. A magnetic generator 40 made of a magnetic core 20 and a coil 30 is disposed oppositely to the lower surface of the cathode 12 in the chamber 14. The coil 30 is formed of coils 31a, 31b, 31c. When 3-phase AC currents having 120 deg. different positions are respectively flowed to the coils 31a, 31b, 31c, a traveling magnetic field which moves in the prescribed direction as time elapses is generated on the cathode 12. |
