| 摘要 |
PURPOSE:To measure internal stress by turning one of X-ray sources which irradiate a sample and a measurement point with X-ray beams in the same direction with a detection part at an angular speed with it or in the opposite direction at the same angular speed. CONSTITUTION:If some of diffracted X rays 71-7n is generated at the measurement point 3 of the sample when an X-ray beam 5 is made incident on the measurement point 3 from an X-ray tube S, the diffracted X rays are detected D1-Dn and stored in storage devices M1-Mn. The crystal lattice surface of the sample 1 which generate the diffracted X rays is at right angles to the bisector between the beam 5 and one of the X rays 71-7n, but a detector base H and the X-ray tube S move at the same speed in the opposite directions, so bisectors are held unchanged in position. The position of the diffracted rays of the crystal lattice surface perpendicular to each bisector is therefore known from the outputs of respective detectors D1-Dn. Relations between intensity variations and scanning positions of those diffracted rays 7 are stored in the storage devices M1- Mn, so internal stress is calculated from the scanning position where each diffracted rays are maximum. |
