| 摘要 |
PURPOSE:To enhance saturated magnetic flux density and magnetic permeability by directly laminating the Fe-Si alloy thin film of high saturated magnetic flux density on a Fe-Al-Si or Fe-Ni alloy thin film having high magnetic permeability. CONSTITUTION:A Fe-Al-Si alloy is accumulated in the thickness of 4mum by a high frequency sputtering method on a substrate made of crystallized glass optically polished on the surface. A Si-Fe alloy is accumulated in the thickness of 1mum by a sputtering method on the alloy. The laminated magnetic alloy thin film is annealed at 500 deg. in vacuum for 1hr. Thus, a magnetic alloy thin film which has not only high saturated magnetic flux density but high magnetic permeability can be obtained. Accordingly, when the thin film is used as a core material of a magnetic head, recording and reproducing characteristics can be largely improved. |
