| 摘要 |
PURPOSE:To improve the frequency of measurement per unit time by allowing an image pickup element to pick up an image formed through an optical system which has an optical axis difference from the irradiation direction of slit light, and detecting positions of respective parts of a body to be detected with the address signal of a light image detecting circuit. CONSTITUTION:The object body 13 is irradiated with linear slit light 12 from a light source 11, its image is formed through a lens 15 which has an optical axis A different from the irradiation direction, and reflected slit light is photodetected by an image pickup element 16 at the image forming position. On the other hand, the light image 17 on the image pickup element 16 which is scanned through a scanning address generating circuit 19 is detected by a position detecting circuit 20, which outputs an address signal. Then, the positions of respective parts of the object body are detected by an arithmetic circuit 21. Consequently, distances L1 and L2 between the predetermined part 14 of the object body 13 and respective inspection position, etc., are detected. When three scanning lines are used in the detection, the amount of information on the entire photodetection surface 17 is 3/256 time as large as during entire-surface scanning and the scanning signal speed of one screen which is about 80 times is obtained. Therefore, the scanning speed of an image and frequency are increased greatly. |
