| 摘要 |
PURPOSE:To increase response speed, by arranging a diaphragm layer, an oxygen detection element for detecting changes in the oxygen partial pressure, first and second electrodes for the oxygen pump and an oxygen ion conductive solid electrolyte to reduce variations in the characteristic of gas to be measured. CONSTITUTION:An oxygen detection element 17 which detects changes in the oxygen partial pressure as variations in the electric resistance of a transition metal oxide 14 with a pair of electrodes 15 and 16 and a first electrode 18 for the oxygen pump are arranged on a diaphragm layer 12 having a heat generating body 13 buried thereinto and a porous oxygen ion conductive solid electrolyte 19 for the oxygen pump is laminated thereon. In addition, a second electrode 20 for the oxygen pump is laminated on the solid electrolyte 19 to form an oxygen pump 21 together with the first electrode 18 and the solid electrolyte 19. Then, the oxygen partial pressure is controlled near the oxygen detection element 17 with the oxygen pump 21. This increases the response speed with less variations in the characteristic of the gas and simplifies the construction thereby reducing the cost. |
