发明名称 FIELD EMISSION TYPE LIQUID METAL ION SOURCE
摘要 PURPOSE:To have long life, stable operation and reproductivity by providing a pipy holding portion for holding liquid metal to be ionized in which a plurality of perforations are made. CONSTITUTION:A holding portion 10 is consists of W or stainless steel, one end of which is contracted in a conical shape. A needle-like anode 11 is positioned to straight pass the center of the holding portion 10. Whereby, the supply volume is stabilized because liquid metal 15 freely flows into the tip of the needle-like anode 11, and it is possible to obtain reproductivity. Further, it is feasible to set a thermal equilibrium because the thermal capacity of the holding portion 10 is also small and the holding portion 10 exists inside the liquid metal 15, and it is possible to stabilize the operation. Furthermore, it is possible to obtain long life because it is possible to hole a large amount of the liquid metal 15.
申请公布号 JPS6129041(A) 申请公布日期 1986.02.08
申请号 JP19840150002 申请日期 1984.07.19
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 YOSHIDA ZENICHI;IKEDA TANEJIRO
分类号 H01J37/08;H01J27/26 主分类号 H01J37/08
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