| 摘要 |
PURPOSE:To form varied new accumulated material, by bringing electromagnetically excited gaseous hydrogen into contact with condensed base material at another electromagnetic field, and bringing the gas contg. gas sublimed from the base material in to contact with base plate in vacuum vessel. CONSTITUTION:Gaseous hydrogen excited electromagnetically is introduced into vacuum vessel, is brought in to contact with condensing base material under existence or nonexistence of at least one among electric fields or/and magnetic fields having independent degree of freedom respectively and separated from electromagnetic field where hydrogen is excited, sublimed gas from base material is brought in to contact with base plate together with gas in vessel to form accumulated material on the base plate. For condensing base material, elements of group I or III, group IVA having larger atomic weight than that of Ge, group IIB, group V or VIII, etc. of the periodic table are used. Vacuum degree of vacuum vessel is controlled to about 0.1-2Torr, gaseous hydrogen gases extruding sublimed gas can be contained, in this way, property and form of accumulated material can be varied remarkably. |
