| 摘要 |
PURPOSE:To maintain the mechanical strength of a thin film and prevent heat radiation by leaving part of a substrate in a linear or lattice shape. CONSTITUTION:A platinum thin-film electrode 2 is formed on a magnesium oxide substrate 1, a lead titanate thin film 2 is grown, and an NiCr electrode 4 is vapor-deposite thereupon. A groove is formed on the reverse side of the substrate 1 and epoxy resin 5 is pressed in the groove. An opening part 6 is formed of phosphoric acid after the epoxy resin cakes to expose the part 7 formed of only a thin film, manufacturing the infrared detecting element withoug breaking the thin film part. At this time, the width and thickness of a stripe part 8 consisting of part of the substrate 1 are specified to obtain a large output while maintaining the mechanical strength of the thin film 3. |
