发明名称 Reflection electron holography apparatus.
摘要 <p>An apparatus forming a reflection electron hologram, wherein a fraction of an electron wave from an electron source (1) illuminate a specimen (5) and caused to be reflected thereat, the remaining electron wave does not illuminate the specimen, but passes aside, the specimen, and the electron wave reflected from the specimen and the electron wave not illuminating, but passes aside, the specimen, are superimposed one upon the other.</p>
申请公布号 EP0378237(A2) 申请公布日期 1990.07.18
申请号 EP19900100644 申请日期 1990.01.12
申请人 HITACHI, LTD. 发明人 OSAKABE, NOBUYUKI;TONOMURA, AKIRA
分类号 H01J37/22;G01Q30/04;H01J37/28;H01J37/29 主分类号 H01J37/22
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