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发明名称
APPARECCHIATURA PERFEZIONATA PER LA FABBRICAZIONE DI CIRCUITI INTEGRATI
摘要
申请公布号
IT1115712(B)
申请公布日期
1986.02.03
申请号
IT19770020895
申请日期
1977.03.04
申请人
IBM CORP
发明人
分类号
H01L21/822;H01L21/314;H01L21/316;H01L21/318;H01L21/3205;H01L21/322;H01L27/04;(IPC1-7):H01L/
主分类号
H01L21/822
代理机构
代理人
主权项
地址
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