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发明名称
摘要
申请公布号
JPS6117736(U)
申请公布日期
1986.02.01
申请号
JP19840103398U
申请日期
1984.07.09
申请人
发明人
分类号
H01L21/677;H01L21/52;H01L21/58;H01L21/67;H01L21/68;(IPC1-7):H01L21/58
主分类号
H01L21/677
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