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发明名称
APPARATUS FOR FORMING ACCUMULATED FILM CONTAINING SILICON ATOM
摘要
申请公布号
JPS6123760(A)
申请公布日期
1986.02.01
申请号
JP19840140469
申请日期
1984.07.09
申请人
CANON INC
发明人
ISHIHARA SHUNICHI
分类号
C01B33/00;C23C16/50;C23C16/505;C23C16/54;G03G5/08;G03G5/082
主分类号
C01B33/00
代理机构
代理人
主权项
地址
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