| 摘要 |
PURPOSE:To realize efficient ultrasonic processing while setting amplitude and frequency of a tool to specified values by a method wherein detecting means of amplitude and frequency are provided near the tool to be ultrasonic-oscillated to control the ultrasonic-oscillating source based upon the detecting signals. CONSTITUTION:Ultrasonic oscillation energized by an ultrasonic oscillator 8 is transmitted to a bonding tool 9 through the intermediary of a bonding arm 3 to make the bonding tool 9 start ultrasonic-oscillation. The side of bonding tool 9 is irradiated with the light from a light emitter 18 through an optical fiber 20. Then reflected light from the tool 9 is inputted into a light receiver 19 after reversing in the optical fiber 20 to compute the amplitude and frequency at tool 9 by a controller 24 in terms of the strength and cycle of detecting signals. Finally the output energy of power supply 25 may be controlled corresponding to the difference between said values and the reference values to correct the oscillating energy of ultrasonic oscillator 8. |
