| 摘要 |
PURPOSE:To capture mist including foreign matters flying from vapor generator and protect a matter to be dried from being contaminated through deposition of mist to the matter to be dried by providing a mist trap between the vapor generator and a drying portion where the matter to be dried is dried. CONSTITUTION:An evaporation tank 2 (vapor generator) is provided at the bottom part of a cylindrical apparatus body 1 and this evaporation tank 2 stores isopropylalcohol 3. At the upper part of liquid level of isopropylalcohol 3 stored within the evaporation tank 2, for example, a mist trap 7 having the structure where glass wool is inserted into a metal mesh made of stainless steel is provided. Thereby, mist 8 flying from the liquid surface of isopropylalcohol 3 is captured by such mist trap, allowing only the vapor 6 to pass therethrough. A condensed liquid tray 9 is provided at the upper part of mist trap 7 and the liquid which is condensed at the surface of wafer 11 (substance to be dried) located at the vapor drying part 10 (drying part) at the upper side and is dropped on the tray are collected and it can be exhausted and recovered at the outside of apparatus 1. |
