EXPOSURE POSITION DETECTION MECHANISM OF EXPOSURE APPARATUS,申请号JP19840143812-传众专利搜索

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发明名称	EXPOSURE POSITION DETECTION MECHANISM OF EXPOSURE APPARATUS
摘要
申请公布号	JPS6123320(A)	申请公布日期	1986.01.31
申请号	JP19840143812	申请日期	1984.07.11
申请人	HITACHI SEISAKUSHO KK	发明人	SUGIYAMA HIDEJI
分类号	H01L21/30;G03F9/00;H01L21/027	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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