| 发明名称 |
Liquid metal ion source |
| 摘要 |
A liquid metal ion source according to the present invention has a needle electrode disposed at a position spaced from a reservoir for holding a source material, and is provided with means for freely varying a distance from the reservoir to the fore end of the needle electrode.
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| 申请公布号 |
US4567398(A) |
申请公布日期 |
1986.01.28 |
| 申请号 |
US19830474473 |
申请日期 |
1983.03.11 |
| 申请人 |
HITACHI, LTD. |
发明人 |
ISHITANI, TOHRU;TAMURA, HIFUMI;SHIMASE, AKIRA |
| 分类号 |
H01J37/08;H01J3/04;H01J27/26;(IPC1-7):H05H1/00;H01J1/02 |
主分类号 |
H01J37/08 |
| 代理机构 |
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| 主权项 |
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