发明名称 |
Method for revealing semiconductor surface damage using surface photovoltage (SPV) measurements |
摘要 |
The presence of crystallographic damage in a semiconductor surface region is determined by surface photovoltage (SPV) measurements. Deviations from the idealized straight line SPV plot of photon flux (Io) versus reciprocal absorption coefficient ( alpha -1) in upward-facing concave form are used as a criterion of surface quality. This criterion is used to determine the minimum etching required to remove the damaged surface.
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申请公布号 |
US4567431(A) |
申请公布日期 |
1986.01.28 |
申请号 |
US19830547326 |
申请日期 |
1983.10.31 |
申请人 |
RCA CORPORATION |
发明人 |
GOODMAN, ALVIN M. |
分类号 |
G01R31/26;(IPC1-7):G01R31/26 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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