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发明名称
ELECTRONIC BEAM IRRADIATOR
摘要
申请公布号
JPS6119126(A)
申请公布日期
1986.01.28
申请号
JP19840139088
申请日期
1984.07.06
申请人
NIPPON DENSHIN DENWA KOSHA
发明人
MURASHITA TATSU
分类号
G03F7/20;H01L21/027;H01L21/30
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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