| 摘要 |
PURPOSE:To stably transport a workpiece without lowering the conveying amount, not influenced by an availability factor of a processing device by temporarily keeping workpieces on a keeping rack between two conveying mechanisms different in the conveying amount, and supplying a required amount of workpieces from the keeping rack to the processing device. CONSTITUTION:A conveying truck 1 functioning as the first conveying mechanism is adapted to convey a large amount of workpieces of a semiconductor integrated circuit between job-shop processing device groups. On the other hand, the second conveying mechanism 4 is adapted to convey a small amount of workpieces to each processing device 5. In the thus constructed conveying apparatus, there is provided a keeping rack 3 disposed on supply side of the second conveying mechanism 4, which is adapted to absorb an aberration in the conveying amount between both conveying mechanisms 1, 4 by temporarily keeping workpieces and supply a required amount of workpieces to the second conveying mechanism 4. Further provided is the third conveying mechanism 2 adapted to receive a workpiece from the conveying truck 1 and carry in same on the keeping rack 3. In this arrangement, the workpieces can be conveyed stably without lowering the conveying amount, not influenced by an availability factor of the processing device 5. |
