| 摘要 |
PURPOSE:To easily mount and demount a protection member and to use it repeatedly by fitting a frame which surrounds a pattern area formed on a mask substrate temporarily to the mask substrate with a magnet, and spreading a protective film in the frame at a spcific interval from the substrate. CONSTITUTION:Frames 112A and 112B surrounding pattern parts PA and PB formed on both surfaces of the substrate 100 made of glass are fitted temporarily to both sides of the substrate 100 across sheet materials 114A and 114B by utilizing magnetic force. Magnets 120A and 120B are fitted at four corners of the frames 112A and 112B and the frames 112A and 112B are so arranged that the magnets are at the opposite positions on both sides of the substrate 100. Thin films 118A and 118B are fitted to the frames 112A and 112B at distances DA and DB from the pattern surfaces. Consequently, the protection members 106 and 108 are easily detached and used repeatedly. |
