Apparatus and method for coating a substrate using vacuum arc evaporation,申请号US19910809727-传众专利搜索

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发明名称	Apparatus and method for coating a substrate using vacuum arc evaporation
摘要
申请公布号	US5269898(A)	申请公布日期	1993.12.14
申请号	US19910809727	申请日期	1991.12.17
申请人	VAPOR TECHNOLOGIES, INC.	发明人	WELTY, RICHARD P.
分类号	C23C14/24;C23C14/32;(IPC1-7):C23C14/22	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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