| 摘要 |
PURPOSE:To perform an attachment of pellet with high precision and to contrive to upgrade the mass-productivity and the quality of pellet by a method wherein the cavity part is used as the positioning reference of the package. CONSTITUTION:The base 5 of the ceramic package sent for being heated on a heat block 6 comes to the pellet attaching station. A cavity guide 1 is inserted in a cavity 7 and the cavity guide 1 continues pressing the ceramic package base 5 until an X-direction press plaw 3 and a Y-direction press plaw 2 are brought into contact to this cavity guide 1. Under this state, a package base press 4 is made to descend and makes the package base 5 fix at the prescribed position on the heat block 6. By this way, the ceramic package base can be positioned with the cavity 7, which is set with both of the A and B lines of its inner wall as the reference, as the reference. After this, the cavity guide 1 is made to shift to the upper direction and a square collet 8 vacuum-sucking a semiconductor pellet 9 performs an attachment of the pellet to the package base 5. |
