| 摘要 |
<p>PURPOSE:To allow high-precision machining by dispersively forming holes on the flat surface of an elastic member and interspersing an adequate quantity of water between a plate-like work and the elastic member. CONSTITUTION:Holes 4 are disperesively formed on the flat surface of an elastic member fitted to a substrate 6 and directly holding a plate-like work. Accordingly, an adequate quantity of water can be interspersed between the plate-like work and the elastic member and the work can be firmly held, thereby the work is prevented from being moved during polish machining or being peeled off a polishing jig after the completion of polishing. As a result, the work can be polish-machined with high precision without being damaged.</p> |
