发明名称 Improvements in and relating to thin film deposition.
摘要 <p>An apparatus for depositing a mono or multimolecular layer film on a substrate has a trough (1) in which the liquid sub-phase (W) is received, the sub-phase carrying a monomolecular layer film of e.g. a diacetylenic fatty acid. The apparatus has a barrier system (4) consisting of a boom (40) which is pivoted on the centre of a rigid spoked ring (42) and pivotable towards and away from the adjacent spoke to compress the molecular layer the desired amount. The vertical position of the ring is adjustable by bolts (24) to position the upper surface of the adjacent spoke (41) and lower surface of the boom (40) below but not through the liquid surface. This enables the monomolecular layer to be compressed without leakage of molecules and also allows contaminants to be collected by sweeping the boom across the surface before the layer is added.</p>
申请公布号 EP0169031(A1) 申请公布日期 1986.01.22
申请号 EP19850304960 申请日期 1985.07.11
申请人 NIMA TECHNOLOGY LIMITED 发明人 GRUNFELD, FRANK AMIN
分类号 H01L51/05;B05C3/02;B05C3/05;B05D1/20;H01L21/205;H01L49/02;H01L51/40;(IPC1-7):B05C3/04 主分类号 H01L51/05
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