发明名称 DEPOSITING A CARBON FILM ON A SUBSTRATE
摘要 There is disclosed a method for depositing a diamond or diamond-like carbon film on at least one substrate employing a hydrocarbon gas and at least one gas which preferentially removes by chemical sputtering other forms of carbon, especially graphite from said film to thereby obtain useful carbon film coated products.
申请公布号 GB2128637(B) 申请公布日期 1986.01.22
申请号 GB19830025412 申请日期 1983.09.22
申请人 * TECHNION RESEARCH AND DEVELOPMENT FOUNDATION LTD 发明人 GERHARD * LEWIN;DAN * NIR
分类号 A61F2/00;A61L27/30;C23C14/32;C23C16/27;C23C16/513;(IPC1-7):C23C11/10 主分类号 A61F2/00
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