发明名称 Light-sensitive polymer composition with poly(amic acid), bisazide, and tertiary amine compound
摘要 A light-sensitive polymer composition comprising a poly(amic acid), a special bisazide compound and an amine compound can give a film which has high sensitivity and in which portions exposed to light are not easily released by a developing solution at the time of development.
申请公布号 US4565767(A) 申请公布日期 1986.01.21
申请号 US19840603451 申请日期 1984.04.24
申请人 HITACHI, LTD;HITACHI CHEMICAL COMPANY, LTD. 发明人 KATAOKA, FUMIO;SHOJI, FUSAJI;OBARA, ISAO;TAKEMOTO, ISSEI;YOKONO, HITOSHI;ISOGAI, TOKIO;KOJIMA, MITSUMASA
分类号 C08F290/00;C08F299/00;C08G73/00;C08G73/02;C08G73/10;C08L79/08;G03F7/012;G03F7/038;G03F7/26;H01L21/312;H01L21/47;(IPC1-7):G03C1/71 主分类号 C08F290/00
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