| 摘要 |
A silicon crucible for use in holding a silicon melt in the drawing of silicon bars for the production of silicon wafers in the semiconductor industry is provided with a protective coating, e.g. of silicon nitride, by the use of a vapor generator in which granules of a low electrical conductivity and low thermal conductivity material are disposed between a pair of electrodes and an electric current is supplied with induces localized vaporization from the granules at their contact points but without bodily melting the granules. Nitrogen can be applied to the mass as a carrier gas and to react with the silicon vapor thus formed.
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