| 摘要 |
PURPOSE:To improve measuring accuracy, by making the force of holding a sample carrier larger than that of pressing it down with a measuring terminal when the thickness is measured at several points with the freely liftable sample carrier kept lifted. CONSTITUTION:This apparatus is made up of a lower table 10a movable horizontally, an upper table 12a placed movably at the right angle thereto, a freely liftable sample carrier 22, a comparator 16 for measurement, a base, a transfer unit and the like. The tables 10a and 12a form a through hole at the center thereof and the table 12a is made somewhat less than the width of the sample 18 to place it. In operation, after a measuring terminal 17 of the comparator 16 is lifted, the sample 18 is placed on the table 12a. Then, the terminal 17 is lowered and grasps the sample 18 with the upper end of the sample carrier 22 to measure the thickness thereof. Then, the terminal 17 and the sample carrier 22 are lifted or lowered and the tables 10a and 12a are moved. Then, the terminal 17 and the sample carrier 22 are lowered or lifted to grasp the sample 18 for measurement. Thus, this eliminates room measuring errors though the measuring point is changed by horizontally moving the sample. |
