| 摘要 |
PURPOSE:To permit the control with high accuracy by forming at least a part of the horizontal part and the vertical part of a plurality of displacement members planted in matrix form onto the body part, from piezoelectric element units. CONSTITUTION:A plurality of displacement members 12 are planted in matrix form onto the surface of a body part 10. In said displacement member 12, a pair of vertical parts 14 and 20 are formed, having a horizontal part 18 interposed, and the first and the second piezoelectric element units 22a and 22b are installed onto a part of the horizontal part 18 and the other vertical part 20. When signals are supplied from a control circuit alternately for each displacement member group which shifts in the X direction or Y direction, among the displacement members 12 planted onto the body part 10, the body part 10 shifts freely in the direction of X-Y with respect to a floor surface 26. |
