PROCESSO DI FABBRICAZIONE DI LINEE METALLICHE ULTRA STRETTE,申请号IT19780020425-传众专利搜索

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发明名称	PROCESSO DI FABBRICAZIONE DI LINEE METALLICHE ULTRA STRETTE
摘要
申请公布号	IT1112664(B)	申请公布日期	1986.01.20
申请号	IT19780020425	申请日期	1978.02.21
申请人	IBM CORP	发明人
分类号	B21C37/04;C23C14/48;C23F1/02;C23F4/00;H01L21/306;H01L21/768;H01L39/24;(IPC1-7):H01B/	主分类号	B21C37/04
代理机构		代理人
主权项
地址

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