| 摘要 |
PURPOSE:To improve short pulse performance by arranging plural ultrasonic wave oscillators on the same surface of an oscillator holder in parallel, and arranging one electrode surface in parallel to the oscillation surface of each oscillator member and the other electrode surface between oscillators. CONSTITUTION:A thin-film type ground-side electrode 73 is provided at the objective body side of a piezoelectric element 71. An electrode 70 for polarization for initializing the piezoelectric element 71 only once is arranged at the opposite side. Plural slit grooves 78 are formed by cutting the electrode 73 and a plate type driving-side electrode 72 is embedded and fixed to specific height from the bottom of a groove 78, and the electrodes 72 and 73 are combined together across the element 71 to constitute plural oscillators 102, 102... which are driven independently. The surface of the electrode 72 and the surface of the electrode 73 are mutually vertical. Consequently, pulses are shortened greatly in length, and consequently distance resolution is improved because of the short pulses even for acoustic pulses of merely the same high frequency. |
