| 摘要 |
PURPOSE:To enable accurate measurement of dimensions and position in a sample while correctly determining changes inside the sample, by providing a transmitter which is capable of applying a high frequency current to a piezo- electric thin film of a lens, a receiver for receiving an electrical signal or the like. CONSTITUTION:A transmitter 7 is provided with switches (SW)20a and 20c connectable to a planar sound wave lens 1 or a spherical sound wave lens 2 while a receiver 8 is provided with switches 20b and 20d in such a manner as to be allowed to receive a signal from either of the lenses 1 and 2. To detect an internal hollow or a flaw of a sample 6, the switches SW 20a and 20c are connected to a transmitter 7 so as to set the lens 2 to the transmitting position while the lens 1 is connected to a receiver 8 by changing over the switches 20b and 20c to turn the lens 1 to the receiving position. Then, a hollow or a defect in a sample 6 is detected accurately. On the other hand, to find the defect and the positional relationship, the connection sequence is reversed. By so doing, the size and the position of the defect can be measured accurately. |
