| 摘要 |
PURPOSE:To enhance sensitivity, in providing a fixed electrode on a base, by laminating very thin coating films on the bottom of a coarse recess part, which is provided in the surface of the base, adjusting the depth of the recess part in this way, and providing the fixed electrode on the laminated body. CONSTITUTION:A coarse recess part 2 is provided in the surface of a base 1 comprising auqrtz glass and the like. When the base 1 is made of the quartz glass, many very thin coating films 3 made of burned glass of alkoxide of Si, which is an insulating material having the same quality as that of the quartz glass, are laminated in the recess part 2, and a laminated body 4 is formed. A fixed electrode 5 is provided on the laminated body 4 by metal evaporation coating and the like. A position varying electrode 7 is provided at a specified position of the inner surface of a deflecting plate 6. The plate 6 is stuck to the surface of the base 1 through a bonding agent so as to form a unitary body. The electrodes 5 and 7 are provided in a vacuum gap 8 so as to face each other. Thus a pressure sensor is formed. In this way, an interval D between the electrodes is made to be an arbitrary minute gap. |
