| 摘要 |
PURPOSE:To prevent dust from adhering to a pattern face, by enclosing the pattern face of a glass mask with a dust-preventing thin film being spaced, which transmits exposing light, coating adhesive on the thin film internal face, and by electrifying dust in the vicinity of the pattern face. CONSTITUTION:On the internal face of a nitrocellulose thin film 9 which is expanded over an enclosure frame 8, adhesive 10 which does not obstruct transmission of ultraviolet rays is coated. Next, nearby dust is electrified, for example with positive charges, by employing an electrostatic charger 11, when this enclosure frame 8 is to be arrayed over the pattern face of a glass mask. Therefore, dust 12 which is confined by the glass mask 3, enclosure frame 8 and nitrocellulose thin film 9, is electrified with positive charges. When the glass mask 3 has electric field to be applied, with the mask 3 arrayed between an upper positive electrode 14 and a lower negative electrode 15 of an electric field generator, dust 12 which has electrified with positive charges is attracted toward the negative electric field, and adheres to the adhesive 10 laid on the thin film 9, with the result that there are no dust adhering to the chromium thin film 4 of the glass mask 3. |
