| 摘要 |
PURPOSE:To facilitate preset of the conditions for drying substrates by enabling to vary positions in height and angles of nozzles easily by connecting the pipes provided with the nozzles with gas supply pipes by eccentric flanges comprising seals. CONSTITUTION:A rotation from a drive motor 20 is transmitted to a roller 17 through a drive pulley 21, a round belt 22 and a follower pulley 23 and transports a substrate 16. The substrate 16 is dried during the transportation as the water contents of it is removed by a nitrogen gas of 50-60 deg.C blown off from nozzles 29 and 39 of the pipes 28 and 38 provided with said nozzles. At this time, the pipes 28 and 38 having nozzles can change the directions of the nozzles 29 and 39 into C and D directions by changing the attached positions to eccentric flanges 27 and 37 into the rotating direction. Also the heights of the nozzles 28 and 38 can be changed into E and F directions by changing the attaching positions of the eccentric flanges 27 and 37 and gas supply pipes 25 and 35 into the rotating position. |
