摘要 |
PURPOSE:To improve the resolution of a sensor and improve its accuracy by using the crystal resonator for a flexural mode vibrator which is impressed with force at both end parts, and rotating this vibrator by a specific angle around the X axis as an axis of rotation and cutting a Z plate. CONSTITUTION:The vibrator is formed into the bar type crystal resonator which has width (w), length l, and thickness (t), and both end parts are fixed. Further, external force F is impressed. The basic wave oscillation frequency (f) of this both-end fixed bar is expressed by an equation I, where f0 is a resonance frequency in no load F. It is evident from the equation I that the sensitivity is increased only by making the length l large, secondary inertial moment I small, and Young's modulus E small. For the purpose, the vibrator is rotated around the X axis by a rotational angle of 150-175 deg. and the Z plate is cut. The vibrator, therefore, has maximum load sensitivity, so the resolution is high and the sensor is reduced in size and has shock resistance. |