发明名称 METHOD AND TOOL FOR MANUFACTURING X-RAY OPTICAL SYSTEMS
摘要 FIELD: X-ray optics; physical instrumentation engineering, X-ray microlithography, astronomy, medicine, etc. SUBSTANCE: method involves shaping of packing from polycapillary monolithic glass assemblies of prismatic shape, each being heated on one end to plastic state, and other end held at room temperature being gripped to displace assembly translationally along its axis vertically at variable speed of <EMI ID=0.231 HE=6 WI=3 TI=CHI>, and all faces of assembly are acted upon at a time in direction perpendicular to assembly axis with speed <EMI ID=0.232 HE=6 WI=3 TI=CHI>; values of <EMI ID=0.233 HE=6 WI=15 TI=CHI> are set according to equation <EMI ID=0.234 HE=9 WI=24 TI=CHI> depending on X and Y coordinates, where R<SB>n</SB> is design bending radius of peripheral capillary tubes of assembly over circumference; X and Y are coordinates of any capillary tube in any cross-sectional area of system being manufactured over vertical plane, read-out origin of coordinates being assumed as center of circumference of radius R<SB>n</SB>. Tool implementing this method is built up of body mounting displacement mechanism and grip driven by stepping motor that carries cold end of assembly, mechanism for synchronous turning of cams whose number corresponds to number of assembly faces, this mechanism being used turn cams about their axes through angle <EMI ID=0.235 HE=6 WI=15 TI=CHI> and provided with screw gear and guides to displace support in vertical direction which is provided with stepping motor, heater with screen insulation secured on body around shaping mechanism, pip union for inlet of neutral medium, screen insulation for stepping motors of cam turning mechanism and vertical translational displacement mechanism of assemblies. EFFECT: improved optical properties and packing density of system. 3 cl, 7 dwgE
申请公布号 RU2107969(C1) 申请公布日期 1998.03.27
申请号 RU19940032811 申请日期 1994.09.08
申请人 ROSSIJSKIJ NAUCHNYJ TSENTR "KURCHATOVSKIJ INSTITUT 发明人 KUMAKHOV M.A.;DMITRUK M.I.;POTURAEV S.V.;POPKOV G.N.;KUMAKHOV M.A.;DMITRUK M.I.;POTURAEV S.V.;POPKOV G.N.
分类号 H01J35/02;G02B6/04;H05G1/00;(IPC1-7):H01J35/02 主分类号 H01J35/02
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