| 摘要 |
PROBLEM TO BE SOLVED: To prevent the damage of a carrying part, in the carriage by the carriage mechanism of a semiconductor mafnuacture device. SOLUTION: A magnet 2a of N pole is attached to one end of a nut part 2, and a magnet 2 of s pole is attached to the other end of the nut part 2. On the other hand, the magnetic stopper block 1Bof the magnet of N pole, the same polarity, is attached to repel, by magnetic force, the magnet 2a of the N pole at one end of the nut part 2. Hereby trouble ceases to occur such as that they collide against each other by the repulsion of the magnetic force between the n-pole magnet of the nut part 2 and the N pole magnet of the magnextic stopper block 1B. Moreover, the magnetic stopper block 1A of the magnet of S pole, the same polarity, is attached to repel, by magnetic force, the magnet 2b of the S pole at the other end of other the by part 2. Hereby, trouble ceases to occur such as that they collide against each other the repulsion of magnetic force between the S-pole magnet of the nut part and the S-pole magnet of the magnetic stopper block 1A. |
