发明名称 DEVICE FOR POSITIONING PATTERN AND METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a pattern positioning device and method in which the relative positions of two picture data corresponding to two pattern pictures can be exactly positioned. SOLUTION: Prescribed feature points A and B in a pattern are extracted in each first block BK1 in a reference picture data 100, vectors A1, A2, B1, and B2 from those feature points A and B to a reference position P are calculated, and a feature point/vector table 300 indicating the corresponding relation of each feature point with the vectors is prepared. The feature points A and B are extracted in each second block BK2 of picture data 200 to be inspected, pixel positions indicated by the corresponding vectors A1, A2, B1, and B2 from each feature point A and B in the second block BK2 are calculated by referring to the feature point/vector table 300, 1 is added to the corresponding elements of a count matrix 400, and pixel positions corresponding to elements having the maximum count values of the count matrix 400 are detected.
申请公布号 JPH1091788(A) 申请公布日期 1998.04.10
申请号 JP19960247573 申请日期 1996.09.19
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 ONISHI HIROYUKI
分类号 G01B11/00;G06T1/00;G06T7/00;H01L21/027;(IPC1-7):G06T7/00 主分类号 G01B11/00
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