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发明名称
SUBSTRATE HEATING APPARATUS FOR MOLECULAR BEAM EPITAXY
摘要
申请公布号
GB2134932(B)
申请公布日期
1986.01.15
申请号
GB19840003169
申请日期
1984.02.07
申请人
* WESTERN ELECTRIC COMPANY INCORPORATED
发明人
SEAN NG * FINEGAN;JAMES HOFFMAN * MCFEE;ROBERT GERALD * SWARTZ
分类号
H01L21/203;C30B23/06;(IPC1-7):C30B23/06
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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