| 摘要 |
PURPOSE:To obtain a plasma source requiring only a small quantity of electric power to be supplied to a magnetic field generator by jointly using a permanent magnet and an electromagnet as the magnetic field generator. CONSTITUTION:In the vicinity of a discharge chamber, a magnetic field is impressed in the direction crossing over a microwave electric field approximately at a right angle by a magnetic field generator consisting of a solenoid coil 8a arranged so as to surround the dischrge chamber 5, a permanent magnet 8b, a magnetic path made of a high transmission member and an auxiliary magnetic pole 8d for controlling magnetic field distribution inside the discharge chamber 5. The magnification intensity of the permanent magnet 8b is made to be such as required to generate the magnetic field of 500 gauss by the single permanent magnet 8b inside the discharge chamber 5, while a DC is made to flow in a solenoid coil 8a and its polarity accords with that of the permanent magnet 8b. Thereby, electric power to be supplied to the solenoid coil 8a can be made not to exceed a half of the conventional quantity. |
