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发明名称
MOS CAPACITOR AND ITS FABRICATION
摘要
申请公布号
KR0174313(B1)
申请公布日期
1999.02.01
申请号
KR19950022346
申请日期
1995.07.26
申请人
MATSUSHITA ELECTRONICS CORPORATION
发明人
KUDO, CHIAKI;YAMAMOTO, AKIHIRO
分类号
H01L21/225;H01L21/334;H01L27/06;H01L27/08;H01L29/94;(IPC1-7):H01L27/10
主分类号
H01L21/225
代理机构
代理人
主权项
地址
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