| 摘要 |
PURPOSE:To stabilize the control efficiency of mixed gas by controlling the feedback of the flow rate of low calorie gas by the load variation of the mixed gas and that of high calorie gas by gain to be varied in accordance with the calorie variation width of the mixed gas. CONSTITUTION:A mixed gas (M gas) calorie control device is constituted of an M gas pressure generator 12, an M gas pressure control 14, a high calorie (C) gas and low calorie (B) gas flow rate controllers 26, 16, etc. and a variable gain element 50 is arranged between an M gas calorie controller 39 and a ratio setter 24 to change the gain to be required in case of controlling the feedback of the flow rate of the C gas in accordance with the calorie variation with DELTAHm and flow rate of the M gas. If the ratio of the B gas flow rate to the C gas flow rate is changed by DELTAR to balance both the flow rates when an M gas calorie value detected by an M gas calorie meter 38 is changed by DELTAHm, the gain is changed by said variable gain element 50 to suppress the variation. |
