| 摘要 |
PURPOSE:To automatically carry out the positioning of a disk type object by providing abutting members for determining the position along the orthogonally crossing axes passing the center of disk type object and supporting members which movably supports said abutting members. CONSTITUTION:A mask 4 is carried to the positioning area by a fork 1 while it is housed in the lower cover 2 of cassette. The mask positioning mechanism supported by the mask carrying arm 5 is moved downward by the arm 5 until the roller 11 of four pushing arms 10 reaches the same level as the circumferencial side surface of mask 4. Next, four pushing arms 10 are moved toward the center of substrate 6, causing the roller 11 to collide with the mask 4 and the mask 4 is supported by the four pushing arms 10. Under this condition, distance from the center of substrate 6 of the four pushing arms 10 is adjusted and the mask 4 is positioned in the X and Y directions with reference to the circumference of mask. |
