| 摘要 |
PURPOSE:To form a uniform and high-quality thin film efficiently by adhesion, by making a substrate holder movable so that the time in which a shadow is projected on the same position of a substrate can be shortened on projecting a mesh anode from the target side to the substrate side. CONSTITUTION:A shutter 7 is opened, and substrates 6, 6, 6 are faced a target 5 through a mesh anode 13. A substrate holder 3 is rotated by a motor 14, and prescribed d.c. voltage is impressed from a power source 8 for sputtering and a bias supply 9 to execute thin sputtering. At this time, the substrate holder 3 is rotating, so a pattern of the shadow projected by the mesh anode 13 from the target 5 side to the substrates 6, 6, 6 side changes with the passage of time. Accordingly, the shaded part on the substrates 6, 6, 6 does not stay in a specific position. |
