| 摘要 |
PURPOSE:To reduce manufacturing cost largely by integrally forming a photosensor array enabling closely adhesive reading, a read-gate array for reading signal charges read by the photosensor array and a charge transfer element for transferring a read signal onto a single substrate. CONSTITUTION:A plurality of primary sensors in which photosensor arrays 18 into amorphous or polycrystalline regions, read-gates 17 for reading signal charges read by the photosensor arrays into single crystal regions, and charge transfer elements 16 for transferring read signals are arranged and formed integrally onto the amorphous or polycrystalline regions shaped onto a single substrate 1 and semiconductor thin-films 3 consisting of the single crystal regions are arranged in parallel, and read-gates for reading outputs from the charge transfer elements for each primary sensor in succession and the charge transfer elements are formed integrally in the direction vertical to the primary sensor group, thus shaping a closely adhesive reading type photosensor. |
