| 摘要 |
PURPOSE:To improve a production rate and yield on manufacture by moving a substrate horizontally held in a vertical type electric furnace in a nitrogen atmosphere having a temperature gradient in the vertical direction in the vertical direction and thermally treating the substrate. CONSTITUTION:Structure in which a chain conveyor 33 in which a large number of baking-vessel cradles 35 horizontally supported are arranged is mounted and the chain conveyor can be moved in the vertical direction is formed. A soaking section is shaped in the vertical direction in the vicinity of the center of a furnace and temperature-elevating and temperature-lowering sections are formed to the upper and lower sections of the center of the furnace by a wiring heating element 32 wound on the outside of a core pipe 31 in temperature distribution in the furnace. Nitrogen gas is introduced from a lower inlet and outlet 39, and discharged from an upper inlet and outlet 38. Baking vessels 34 are taken into the furnace from a curtain 36 for the upper inlet and outlet, and placed horizontally onto the cradles 35, the chain conveyor 33 is shifted downward, and the baking vessels are thermally treated, and can be extracted to the outside of the furnace from a curtain 37 for the lower inlet and outlet. |
